Blar i NTNU Open på forfatter "Chaikasetsin, Settasit"
-
Approaching the Limits of Aspect Ratio in Free-Standing Al2O3 3D Shell Structures
Burgmann, Stephanie; Lid, Markus Joakim; Chaikasetsin, Settasit; Bjørdal, Dag Skjerven; Prinz, Fritz; Provine, John; Berto, Filippo; Van Helvoort, Antonius; Torgersen, Jan (Peer reviewed; Journal article, 2022)Nanoscale free-standing membranes are used for a variety of sensors and other micro/nano-electro-mechanical systems devices. To tune performance, it is indispensable to understand the limits of aspect ratios achievable. ...